Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealing

In this study, aluminum oxide (Al(2)O(3)) films were prepared by a spatial atomic layer deposition using deionized water and trimethylaluminum, followed by oxygen (O(2)), forming gas (FG), or two-step annealing. Minority carrier lifetime of the samples was measured by Sinton WCT-120. Field-effect pa...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Hsu, Chia-Hsun, Cho, Yun-Shao, Wu, Wan-Yu, Lien, Shui-Yang, Zhang, Xiao-Ying, Zhu, Wen-Zhang, Zhang, Sam, Chen, Song-Yan
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2019
Assuntos:
Nano Express
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6473015/
https://ncbi.nlm.nih.gov/pubmed/31001714
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-019-2969-z
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