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Investigation on the passivated Si/Al(2)O(3) interface fabricated by non-vacuum spatial atomic layer deposition system
Currently, aluminum oxide stacked with silicon nitride (Al(2)O(3)/SiN(x):H) is a promising rear passivation material for high-efficiency P-type passivated emitter and rear cell (PERC). It has been indicated that atomic layer deposition system (ALD) is much more suitable to prepare high-quality Al(2)...
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| Publicado no: | Nanoscale Res Lett |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4385260/ https://ncbi.nlm.nih.gov/pubmed/25852389 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-0803-9 |
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