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Iridium wire grid polarizer fabricated using atomic layer deposition
In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on it...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3213227/ https://ncbi.nlm.nih.gov/pubmed/22023700 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-558 |
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