Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells

In this study, spatial atomic layer deposition (sALD) is employed to prepare titanium dioxide (TiO(2)) thin films by using titanium tetraisopropoxide and water as metal and water precursors, respectively. The post-annealing temperature is varied to investigate its effect on the properties of the TiO...

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Veröffentlicht in:Nanomaterials (Basel)
Hauptverfasser: Hsu, Chia-Hsun, Chen, Ka-Te, Huang, Pao-Hsun, Wu, Wan-Yu, Zhang, Xiao-Ying, Wang, Chen, Liang, Lu-Sheng, Gao, Peng, Qiu, Yu, Lien, Shui-Yang, Su, Zhan-Bo, Chen, Zi-Rong, Zhu, Wen-Zhang
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2020
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Article
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7408533/
https://ncbi.nlm.nih.gov/pubmed/32635629
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10071322
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