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Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station
We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide det...
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| Publicado no: | IEEE Trans Device Mater Reliab |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6459617/ https://ncbi.nlm.nih.gov/pubmed/30983909 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TDMR.2018.2817341 |
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