A carregar...

Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station

We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide det...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Publicado no:IEEE Trans Device Mater Reliab
Main Authors: McCrory, Duane J., Anders, Mark A., Ryan, Jason T., Shrestha, Pragya R., Cheung, Kin P., Lenahan, Patrick M., Campbell, Jason P.
Formato: Artigo
Idioma:Inglês
Publicado em: 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6459617/
https://ncbi.nlm.nih.gov/pubmed/30983909
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TDMR.2018.2817341
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!