Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station

We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide det...

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Bibliografiset tiedot
Julkaisussa:IEEE Trans Device Mater Reliab
Päätekijät: McCrory, Duane J., Anders, Mark A., Ryan, Jason T., Shrestha, Pragya R., Cheung, Kin P., Lenahan, Patrick M., Campbell, Jason P.
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: 2018
Aiheet:
Article
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC6459617/
https://ncbi.nlm.nih.gov/pubmed/30983909
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TDMR.2018.2817341
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