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Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station
We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide det...
Tallennettuna:
| Julkaisussa: | IEEE Trans Device Mater Reliab |
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| Päätekijät: | , , , , , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
2018
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| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6459617/ https://ncbi.nlm.nih.gov/pubmed/30983909 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TDMR.2018.2817341 |
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