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CMOS MEMS Fabrication Technologies and Devices
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements,...
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| Publié dans: | Micromachines (Basel) |
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| Auteur principal: | |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI
2016
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189935/ https://ncbi.nlm.nih.gov/pubmed/30407387 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7010014 |
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