Loading...
CMOS MEMS Fabrication Technologies and Devices
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements,...
Na minha lista:
| Udgivet i: | Micromachines (Basel) |
|---|---|
| Hovedforfatter: | |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2016
|
| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189935/ https://ncbi.nlm.nih.gov/pubmed/30407387 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7010014 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|