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CMOS MEMS Design and Fabrication Platform
This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS integrated sensing single chip. The front-end CMOS p...
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| Autor principal: | |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Frontiers Media S.A.
2022-04-01
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| Colecção: | Frontiers in Mechanical Engineering |
| Assuntos: | |
| Acesso em linha: | https://www.frontiersin.org/articles/10.3389/fmech.2022.894484/full |
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