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Development of CMOS-MEMS/NEMS Devices

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...

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Main Authors: Verd, Jaume, Segura, Jaume
Format: Livro
Language:Inglês
Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
Subjects:
TA1-2040
T1-995
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
encapsulation
n/a
NEM memory switch
magnetotransistor
gas sensor
nano-system array
metal oxide (MOX) sensor
capacitive pressure sensor
real-time temperature compensation loop
mechanical relays
single-crystal silicon (SC-Si)
MEMS relays
MEMS
oscillator
micro-electro-mechanical system (MEMS)
uncooled IR-bolometer
microelectromechanical systems
microbolometer
programmable sustaining amplifier
micro sensor
CMOS-MEMS
pierce oscillator
MEMS resonators
micro/nanoelectromechanical systems (MEMS/NEMS)
resonator
microhotplate
NEMS
application-specific integrated circuit (ASIC)
MEMS modelling
magnetic field
chopper instrumentation amplifier
microresonators
interface circuit
Hall effect
thermal detector
temperature sensor
infrared sensor
CMOS–NEMS
CMOS
atomic force microscope
MEMS switches
stent
micro-electro-mechanical systems (MEMS) sensors
nano resonator
silicon-on-insulator (SOI)
MEMS-ASIC integration
Sigma-Delta
MEMS characterization
high-Q capacitive accelerometer
mass sensors
M3D
Online Access:https://directory.doabooks.org/handle/20.500.12854/44945
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