Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...
Tallennettuna:
| Päätekijät: | , , , |
|---|---|
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
MDPI AG
2020-08-01
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| Sarja: | Sensors |
| Aiheet: | |
| Linkit: | https://www.mdpi.com/1424-8220/20/17/4663 |
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