Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...
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| Huvudupphov: | , , , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2020-08-01
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| Serie: | Sensors |
| Ämnen: | |
| Länkar: | https://www.mdpi.com/1424-8220/20/17/4663 |
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