Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , |
|---|---|
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI AG
2020-08-01
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| Cyfres: | Sensors |
| Pynciau: | |
| Mynediad Ar-lein: | https://www.mdpi.com/1424-8220/20/17/4663 |
| Tagiau: |
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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