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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...

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Principais autores: Rafel Perello-Roig, Jaume Verd, Sebastià Bota, Jaume Segura
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2020-08-01
Serier:Sensors
Fag:
MEMS resonators
VOCs
temperature sensitivity
CMOS-MEMS
gas sensors
Online adgang:https://www.mdpi.com/1424-8220/20/17/4663
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