Učitavanje...
Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology
This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in...
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| Glavni autori: | , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Molecular Diversity Preservation International (MDPI)
2013
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3690025/ https://ncbi.nlm.nih.gov/pubmed/23645109 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130505720 |
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