A carregar...
Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology
This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in...
Na minha lista:
| Main Authors: | , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2013
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3690025/ https://ncbi.nlm.nih.gov/pubmed/23645109 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130505720 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|