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Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters

Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP(®) actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions....

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Guo, Jianbin, Wang, Jinling, Zeng, Shengkui, Silberschmidt, Vadim V., Shen, Yongguang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187910/
https://ncbi.nlm.nih.gov/pubmed/30400537
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8120348
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