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Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters
Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP(®) actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions....
Gorde:
| Argitaratua izan da: | Micromachines (Basel) |
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| Egile Nagusiak: | , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2017
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187910/ https://ncbi.nlm.nih.gov/pubmed/30400537 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8120348 |
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