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Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters
Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP(®) actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions....
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2017
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187910/ https://ncbi.nlm.nih.gov/pubmed/30400537 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8120348 |
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