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In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Lanthanum and lanthanum nitride thin films were deposited by magnetron sputtering onto silicon wafers covered by natural oxide. In situ and real-time synchrotron radiation experiments during deposition reveal that lanthanum crystallizes in the face-centred cubic bulk phase. Lanthanum nitride, howeve...

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Détails bibliographiques
Publié dans:J Appl Crystallogr
Auteurs principaux: Krause, Bärbel, Kuznetsov, Dmitry S., Yakshin, Andrey E., Ibrahimkutty, Shyjumon, Baumbach, Tilo, Bijkerk, Fred
Format: Artigo
Langue:Inglês
Publié: International Union of Crystallography 2018
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC6068614/
https://ncbi.nlm.nih.gov/pubmed/30100825
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S1600576718007367
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