Loading...
Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed...
Na minha lista:
| Udgivet i: | PLoS One |
|---|---|
| Main Authors: | , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Public Library of Science
2015
|
| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4508053/ https://ncbi.nlm.nih.gov/pubmed/26193701 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1371/journal.pone.0133479 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|