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Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed...
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| 發表在: | PLoS One |
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| Main Authors: | , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Public Library of Science
2015
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4508053/ https://ncbi.nlm.nih.gov/pubmed/26193701 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1371/journal.pone.0133479 |
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