In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Lanthanum and lanthanum nitride thin films were deposited by magnetron sputtering onto silicon wafers covered by natural oxide. In situ and real-time synchrotron radiation experiments during deposition reveal that lanthanum crystallizes in the face-centred cubic bulk phase. Lanthanum nitride, howeve...

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Bibliografiske detaljer
Udgivet i:J Appl Crystallogr
Main Authors: Krause, Bärbel, Kuznetsov, Dmitry S., Yakshin, Andrey E., Ibrahimkutty, Shyjumon, Baumbach, Tilo, Bijkerk, Fred
Format: Artigo
Sprog:Inglês
Udgivet: International Union of Crystallography 2018
Fag:
Research Papers
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6068614/
https://ncbi.nlm.nih.gov/pubmed/30100825
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S1600576718007367
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