A carregar...
Microwave evaluation of electromigration susceptibility in advanced interconnects
Traditional metrology has been unable to adequately address the needs of the emerging integrated circuits (ICs) at the nano scale; thus, new metrology and techniques are needed. For example, the reliability challenges in fabrication need to be well understood and controlled to facilitate mass produc...
Na minha lista:
| Publicado no: | J Appl Phys |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2017
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5761678/ https://ncbi.nlm.nih.gov/pubmed/29332950 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4992135 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|