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Microwave Monitoring of Atmospheric Corrosion of Interconnects
Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric int...
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| Publicado no: | ECS J Solid State Sci Technol |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6604628/ https://ncbi.nlm.nih.gov/pubmed/31275732 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1149/2.0181812jss |
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