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Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory

For the first time, the growth of Ni nanoparticles (NPs) was explored by plasma-assisted atomic layer deposition (ALD) technique using NiCp(2) and NH(3) precursors. Influences of substrate temperature and deposition cycles on ALD Ni NPs were studied by field emission scanning electron microscope and...

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Vydáno v:Nanoscale Res Lett
Hlavní autoři: Qian, Shi-Bing, Wang, Yong-Ping, Shao, Yan, Liu, Wen-Jun, Ding, Shi-Jin
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer US 2017
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5319931/
https://ncbi.nlm.nih.gov/pubmed/28235376
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1925-z
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