Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...

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Dades bibliogràfiques
Publicat a:Nanoscale Res Lett
Autors principals: Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Chuang, Nai-Chuan, Wang, Kao-Yuan
Format: Artigo
Idioma:Inglês
Publicat: Springer US 2016
Matèries:
Nano Express
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://ncbi.nlm.nih.gov/pubmed/27251325
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1480-z
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