Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...

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Vydáno v:Nanoscale Res Lett
Hlavní autoři: Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Chuang, Nai-Chuan, Wang, Kao-Yuan
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer US 2016
Témata:
Nano Express
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://ncbi.nlm.nih.gov/pubmed/27251325
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1480-z
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