Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Chuang, Nai-Chuan, Wang, Kao-Yuan
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2016
Assuntos:
Nano Express
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://ncbi.nlm.nih.gov/pubmed/27251325
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1480-z
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