Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...

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Bibliografske podrobnosti
izdano v:Nanoscale Res Lett
Main Authors: Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Chuang, Nai-Chuan, Wang, Kao-Yuan
Format: Artigo
Jezik:Inglês
Izdano: Springer US 2016
Teme:
Nano Express
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://ncbi.nlm.nih.gov/pubmed/27251325
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1480-z
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