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AlN Nanowall Structures Grown on Si (111) Substrate by Molecular Beam Epitaxy

AlN nanowall structures were grown on Si (111) substrate using molecular beam epitaxy at substrate temperature of 700 °C with N/Al flux ratios ranging from 50 to 660. A few types of other AlN nanostructures were also grown under the nitrogen-rich conditions. The AlN nanowalls were ranged typically 6...

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Dettagli Bibliografici
Pubblicato in:Nanoscale Res Lett
Autori principali: Tamura, Yosuke, Hane, Kazuhiro
Natura: Artigo
Lingua:Inglês
Pubblicazione: Springer US 2015
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4666846/
https://ncbi.nlm.nih.gov/pubmed/26625884
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1178-7
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