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Impact of device size and thickness of Al(2)O(3) film on the Cu pillar and resistive switching characteristics for 3D cross-point memory application

Impact of the device size and thickness of Al(2)O(3) film on the Cu pillars and resistive switching memory characteristics of the Al/Cu/Al(2)O(3)/TiN structures have been investigated for the first time. The memory device size and thickness of Al(2)O(3) of 18 nm are observed by transmission electron...

詳細記述

保存先:
書誌詳細
出版年:Nanoscale Res Lett
主要な著者: Panja, Rajeswar, Roy, Sourav, Jana, Debanjan, Maikap, Siddheswar
フォーマット: Artigo
言語:Inglês
出版事項: Springer US 2014
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC4494016/
https://ncbi.nlm.nih.gov/pubmed/26088986
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-692
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