Wird geladen...

High-performance HfO(x)/AlO(y)-based resistive switching memory cross-point array fabricated by atomic layer deposition

Resistive switching memory cross-point arrays with TiN/HfO(x)/AlO(y)/Pt structure were fabricated. The bi-layered resistive switching films of 5-nm HfO(x) and 3-nm AlO(y) were deposited by atomic layer deposition (ALD). Excellent device performances such as low switching voltage, large resistance ra...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Nanoscale Res Lett
Hauptverfasser: Chen, Zhe, Zhang, Feifei, Chen, Bing, Zheng, Yang, Gao, Bin, Liu, Lifeng, Liu, Xiaoyan, Kang, Jinfeng
Format: Artigo
Sprache:Inglês
Veröffentlicht: Springer US 2015
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4385114/
https://ncbi.nlm.nih.gov/pubmed/25852366
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-0738-1
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!