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Freestanding HfO(2 )grating fabricated by fast atom beam etching

We report here the fabrication of freestanding HfO(2 )grating by combining fast atom beam etching (FAB) of HfO(2 )film with dry etching of silicon substrate. HfO(2 )film is deposited onto silicon substrate by electron beam evaporator. The grating patterns are then defined by electron beam lithograph...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Päätekijät: Wang, Yongjin, Wu, Tong, Kanamori, Yoshiaki, Hane, Kazuhiro
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Springer 2011
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211457/
https://ncbi.nlm.nih.gov/pubmed/21711898
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-367
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