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Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy
In this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of com...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3534003/ https://ncbi.nlm.nih.gov/pubmed/23171543 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-633 |
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