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Ordered Arrays of SiGe Islands from Low-Energy PECVD
SiGe islands have been proposed for applications in the fields of microelectronics, optoelectronics and thermoelectrics. Although most of the works in literature are based on MBE, one of the possible advantages of low-energy plasma-enhanced chemical vapor deposition (LEPECVD) is a wider range of dep...
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| Main Authors: | , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2991192/ https://ncbi.nlm.nih.gov/pubmed/21170397 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-010-9773-0 |
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