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Ordered Arrays of SiGe Islands from Low-Energy PECVD
SiGe islands have been proposed for applications in the fields of microelectronics, optoelectronics and thermoelectrics. Although most of the works in literature are based on MBE, one of the possible advantages of low-energy plasma-enhanced chemical vapor deposition (LEPECVD) is a wider range of dep...
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| 主要な著者: | , , , , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer
2010
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2991192/ https://ncbi.nlm.nih.gov/pubmed/21170397 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-010-9773-0 |
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