Wordt geladen...
CMUT Fabrication Based On A Thick Buried Oxide Layer
We introduce a versatile fabrication process for direct wafer-bonded CMUTs. The objective is a flexible fabrication platform for single element transducers, 1D and 2D arrays, and reconfigurable arrays. The main process features are: A low number of litho masks (five for a fully populated 2D array);...
Bewaard in:
| Hoofdauteurs: | , , , , |
|---|---|
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
2010
|
| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3370668/ https://ncbi.nlm.nih.gov/pubmed/22685377 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5935935 |
| Tags: |
Voeg label toe
Geen labels, Wees de eerste die dit record labelt!
|