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FEA of CMUTs Suitable for Wide Gas Pressure Range Applications
The ability of ultrasound transducers to operate over a wide and varying pressure range is essential in applications such as ultrasonic flow metering (UFM) of flare gas. We propose a new operational mode for capacitive micromachined ultrasonic transducers (CMUTs), in which the plate is in permanent...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3160643/ https://ncbi.nlm.nih.gov/pubmed/21874100 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5935678 |
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