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CMUT With Substrate-Embedded Springs For Non-Flexural Plate Movement
A conventional capacitive micromachined ultrasonic transducer (CMUT) is composed of many cells connected in parallel. Since the plate in each CMUT cell is anchored at its perimeter, the average displacement is several times smaller than the displacement of an equivalent ideal piston transducer. In a...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4175474/ https://ncbi.nlm.nih.gov/pubmed/25264419 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5936014 |
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