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CMUT With Substrate-Embedded Springs For Non-Flexural Plate Movement
A conventional capacitive micromachined ultrasonic transducer (CMUT) is composed of many cells connected in parallel. Since the plate in each CMUT cell is anchored at its perimeter, the average displacement is several times smaller than the displacement of an equivalent ideal piston transducer. In a...
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| Autors principals: | , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2010
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4175474/ https://ncbi.nlm.nih.gov/pubmed/25264419 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5936014 |
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