Učitavanje...
CMUT Fabrication Based On A Thick Buried Oxide Layer
We introduce a versatile fabrication process for direct wafer-bonded CMUTs. The objective is a flexible fabrication platform for single element transducers, 1D and 2D arrays, and reconfigurable arrays. The main process features are: A low number of litho masks (five for a fully populated 2D array);...
Spremljeno u:
| Glavni autori: | , , , , |
|---|---|
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2010
|
| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3370668/ https://ncbi.nlm.nih.gov/pubmed/22685377 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5935935 |
| Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|