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FEA of CMUTs Suitable for Wide Gas Pressure Range Applications

The ability of ultrasound transducers to operate over a wide and varying pressure range is essential in applications such as ultrasonic flow metering (UFM) of flare gas. We propose a new operational mode for capacitive micromachined ultrasonic transducers (CMUTs), in which the plate is in permanent...

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Bibliografische gegevens
Hoofdauteurs: Ho, Min-Chieh, Kupnik, Mario, Khuri-Yakub, Butrus T.
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: 2010
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3160643/
https://ncbi.nlm.nih.gov/pubmed/21874100
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2010.5935678
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