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Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes
Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a vers...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3211272/ https://ncbi.nlm.nih.gov/pubmed/21711738 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-215 |
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