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Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes

Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a vers...

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Bibliografische gegevens
Hoofdauteurs: Harazim, Stefan M, Feng, Ping, Sanchez, Samuel, Deneke, Christoph, Mei, Yongfeng, Schmidt, Oliver G
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Springer 2011
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211272/
https://ncbi.nlm.nih.gov/pubmed/21711738
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-215
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