Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN
Aluminum nitride (AlN) thin film/molybdenum (Mo) electrode structures are typically required in microelectromechanical system applications. However, the growth of highly crystalline and <i>c</i>-axis-oriented AlN thin films on Mo electrodes remains challenging. In this study, we demonstrate the epit...
Guardat en:
| Autors principals: | , , |
|---|---|
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2023-04-01
|
| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2072-666X/14/5/966 |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|