Role of the Oxidation State in Cobalt Chemical Mechanical Planarization
ABSTRACT Cobalt (Co) is a promising next‐generation contact metal to replace tungsten for the system‐large‐scale integration devices beyond the 5 nm technology node due to its low resistivity and high gap‐filling capability at high aspect ratios. To complete Co metallization, surface roughness contr...
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| Hauptverfasser: | , , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Wiley
2025-12-01
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| Schriftenreihe: | MetalMat |
| Schlagworte: | |
| Online-Zugang: | https://doi.org/10.1002/metm.70014 |
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