A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array
Abstract This paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry. Fabricated in a 0.18 µm 1P6M CMOS process with an in-house developed...
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| Autors principals: | , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group
2026-03-01
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| Col·lecció: | Microsystems & Nanoengineering |
| Accés en línia: | https://doi.org/10.1038/s41378-026-01220-5 |
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