A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array
Abstract This paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry. Fabricated in a 0.18 µm 1P6M CMOS process with an in-house developed...
Guardado en:
| Autores principales: | , , , , |
|---|---|
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group
2026-03-01
|
| Colección: | Microsystems & Nanoengineering |
| Acceso en línea: | https://doi.org/10.1038/s41378-026-01220-5 |
| Etiquetas: |
Sin Etiquetas, Sea el primero en etiquetar este registro!
|