A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology
In this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMO...
Guardado en:
| Autores principales: | , , , |
|---|---|
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Frontiers Media S.A.
2022-04-01
|
| Colección: | Frontiers in Mechanical Engineering |
| Materias: | |
| Acceso en línea: | https://www.frontiersin.org/articles/10.3389/fmech.2022.877754/full |
| Etiquetas: |
Sin Etiquetas, Sea el primero en etiquetar este registro!
|