Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror
Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromi...
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| Hauptverfasser: | , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Taylor & Francis Group
2024-12-01
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| Schriftenreihe: | International Journal of Optomechatronics |
| Schlagworte: | |
| Online-Zugang: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2350749 |
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