Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator
A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (i.e. in y-direction) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formu...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Publishing House for Science and Technology
2018-12-01
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| Col·lecció: | Vietnam Journal of Mechanics |
| Matèries: | |
| Accés en línia: | https://vjs.ac.vn/index.php/vjmech/article/view/13215 |
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