An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array

We are developing a phase-modulating micro mirror-array spatial light modulator to be used for real holography within the EU-funded project REALHOLO, featuring millions of pixels that can be individually positioned in a piston mode at a large frame rate. We found earlier that an electrostatic comb-d...

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Detalles Bibliográficos

Principais autores:	Andreas Neudert, Peter Duerr, Mario Nitzsche
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2024-07-01
Series:	Micromachines
Assuntos:	computer-generated holography MEMS phase modulation comb drive actuator electrostatic cross-talk finite element simulation
Acceso en liña:	https://www.mdpi.com/2072-666X/15/8/942
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